AMPERTEC^® RD TUNGSTEN PENTACHLORIDE (WCl₅)

Another new development is AMPERTEC^® RD tungsten pentachloride, WCl₅. This addition expands Taniobis’ portfolio to include a highly reactive form of tungsten that is utilized in coating processes. Another application is catalysis.

The significantly higher vapor pressure of tungsten pentachloride compared to WCl₆ makes it a better choice for depositing tungsten metal layers through ALD/CVD techniques. Customers also use tungsten pentachloride to produce special tungsten(V) compounds for these techniques.